Display
Facility Overview
| Overview | Securing technology for the design, production, and manufacturing of logistics equipment for glass transport in an N2 environment for OLED display panel production. |
|---|---|
| Size | Capable of accommodating various panel sizes (2G to 10.5G) |
| Configuration | Transfer Module, Passage, Buffer, Flip Module |
Main Products
| ITEM | Specification |
|---|---|
| Response Glass Size | 2G~10.5G |
| Supply Gas | N2 by Purifier |
| N2 Condition | H2O/O2, ≤1ppm |
| Leak Rate | ≤0.05Vol%h, ISO10648-2 |
| Chamber material | SUS304/E.P |
| Laminar Flow | EFU, Down flow/side flow |
Facility configuration
Technology in possession
Facility Overview
| Overview | Design/manufacture/acquisition of manufacturing technology for glass transport logistics facilities in a vacuum for OLED/LCD display panel production |
|---|---|
| Size | Capable of accommodating various panel sizes (2G to 10.5G) |
| Configuration | Transfer Module, Load Lock, Passage, Buffer, Flip Module |
Main Products
| ITEM | Specification |
|---|---|
| Corresponding Glass Size | 2G~10.5G |
| Supply Gas | N2 or CDA |
| Pressure | 10-2~10-7 Torr |
| Leak Rate | ≥1.0mTorr/min |
| Chamber material | SUS304/E.P or Aluminum |
Facility configuration
Technology in possession
